This part is a kind of semiconductor called HC101.

Function of this product has High End Humidity Sensors.

Manufacturers : Handling Instructions

Image and pinout :

Some of the text within the PDF file :

HC1000/ HC101 High End Humidity Sensors Typical Applications hand held instruments data loggers meteorology HVAC medical applications Technical Data Sensor Nominal capacitance C76 (at 20 degC) Sensitivity Working range humidity temperature Linearity error (0 ... 98 %RH) Hysteresis (at 70 %RH) Response time t90 Temperature dependence [%RH / degC] Long term stability at 20-30 degC /20-80 %RH Loss tangent Maximum supply voltage (no DC voltage) Maximum DC voltage Operating frequency Material connection leads Features working range 0-100 %RH linearity error < 1.5 %RH wettable long term stable highest repeatability good resistance to pollutants HC1000 HC101 500 ± 50 pF 200 ± 20 pF 1.40 pF / %RH 0.56 pF / %RH 0 ... 100 %RH -40 ... +120 degC < ± 1.5 %RH 1.7 ± 0.15 %RH < 6 sec. [ ... ]

HC101 PDF Datasheet Download